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Microelectronics failure analysis [electronic resource] : desk reference / edited by Richard J. Ross.

Contributor(s): Material type: TextTextPublication details: Materials Park, Ohio : ASM International, c2011.Edition: 6th edDescription: xi, 660 p. : illSubject(s): Genre/Form: DDC classification:
  • 621.381 23
LOC classification:
  • TK7871 .M52 2011
Online resources:
Contents:
section 1. Introduction -- section 2. Failure analysis process overviews -- section 3. Failure analysis topics -- section 4. Fault verification and classification -- section 5. Localization techniques -- section 6. Deprocessing and sample preparation -- section 7. Inspection -- section 8. Materials analysis -- section 9. Focused ion beam applications -- section 10. Management and reference information.
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Includes bibliographical references and indexes.

section 1. Introduction -- section 2. Failure analysis process overviews -- section 3. Failure analysis topics -- section 4. Fault verification and classification -- section 5. Localization techniques -- section 6. Deprocessing and sample preparation -- section 7. Inspection -- section 8. Materials analysis -- section 9. Focused ion beam applications -- section 10. Management and reference information.

Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

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