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Lithography [electronic resource] : principles, processes and materials / Theodore C. Hennessy, editor.

Contributor(s): Material type: TextTextSeries: Engineering tools, techniques and tables | Nanotechnology science and technology seriesPublication details: New York : Nova Science, c2011.Description: xii, 284 p. : ill. (some col.)Subject(s): Genre/Form: DDC classification:
  • 621.3815/31 22
LOC classification:
  • TK7872.M3 L58 2011
Online resources:
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Includes bibliographical references and index.

Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

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