TY  - BOOK
AU  - Tiwari,Atul
AU  - Raj,Baldev
TI  - Materials and failures in MEMS and NEMS
T2  - Materials Degradation and Failures Series
AV  - TK7875 .M384 2015
U1  - 621.381 23
PY  - 2015///
CY  - Salem, Massachusetts, Hoboken, New Jersey
PB  - Scrivener Publishing, Wiley
KW  - Microelectromechanical systems
KW  - Design and construction
KW  - Nanoelectromechanical systems
KW  - Electronic books
N1  - Includes bibliographical references at the end of each chapters and index
UR  - https://ebookcentral.proquest.com/lib/nird-ebooks/detail.action?docID=4040971
ER  -