TY  - BOOK
AU  - Casta�ner,Luis
TI  - Understanding MEMS: principles and applications 
AV  - TK7875 .C37 2016
U1  - 621.381 23
PY  - 2016///
CY  - West Sussex, England
PB  - Wiley
KW  - Microelectromechanical systems
KW  - Electronic books
N1  - Includes bibliographical references and index
UR  - https://ebookcentral.proquest.com/lib/nird-ebooks/detail.action?docID=4183022
ER  -