TY  - BOOK
AU  - Ekwall,Britt
AU  - Cronquist,Mikkel
ED  - ProQuest (Firm)
TI  - Micro electro mechanical systems (MEMS): technology, fabrication processes and applications 
T2  - Nanotechnology science and technology
AV  - TK7875 .M5284 2010
U1  - 621 22
PY  - 2010///
CY  - Hauppauge, N.Y.
PB  - Nova Science Publishers
KW  - Microelectromechanical systems
KW  - Electronic books
N1  - Includes bibliographical references and index; Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries
UR  - https://ebookcentral.proquest.com/lib/nird-ebooks/detail.action?docID=3019660
ER  -