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Micro electro mechanical systems (MEMS) [electronic resource] : technology, fabrication processes and applications / Britt Ekwall and Mikkel Cronquist, editors.

Contributor(s): Material type: TextTextSeries: Nanotechnology science and technology seriesPublication details: Hauppauge, N.Y. : Nova Science Publishers, c2010.Description: xii, 391 p. : ill. (some col.)Subject(s): Genre/Form: DDC classification:
  • 621 22
LOC classification:
  • TK7875 .M5284 2010
Online resources:
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Includes bibliographical references and index.

Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

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