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Low-k nanoporous interdielectrics [electronic resource] : materials, thin film fabrications, structures and properties / Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo.

By:

Ree, Moonhor

Contributor(s):

Material type: Text

Text

TextSeries: Nanotechnology science and technology seriesPublication details: Hauppauge, N.Y. : Nova Science Publishers, c2010.Description: 67 p. : illSubject(s):

Genre/Form:

Electronic books.

DDC classification:

621.381 22

LOC classification:

TK7871.15.F5 R44 2010

Online resources:

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Includes bibliographical references (p. [51]-61) and index.

Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

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