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	1.	No cover image available No cover image available Micro electro mechanical systems (MEMS) [electronic resource] : technology, fabrication processes and applications / Britt Ekwall and Mikkel Cronquist, editors. by Ekwall, Britt Cronquist, Mikkel ProQuest (Firm) Series: Nanotechnology science and technology series Material type: Text; Format: electronic ; Literary form: Not fiction Publication details: Hauppauge, N.Y. : Nova Science Publishers, c2010 Online resources: Click to View Availability: No items available. Add to cart (remove)
	2.	No cover image available No cover image available Microelectromechanical systems [electronic resource] : advanced materials and fabrication methods / Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council. by National Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems ProQuest (Firm) Material type: Text; Format: electronic ; Literary form: Not fiction Publication details: Washington, DC : National Academy Press, 1997 Online resources: Click to View Availability: No items available. Add to cart (remove)
	3.	Materials and failures in MEMS and NEMS / edited by Atul Tiwari and Baldev Raj. by Tiwari, Atul [editor.] Raj, Baldev, 1947- [editor.] Series: Materials Degradation and Failures Series Material type: Text; Literary form: Not fiction Publisher: Salem, Massachusetts ; Hoboken, New Jersey : Scrivener Publishing : Wiley, 2015Copyright date: �2015 Online resources: Click to View Availability: No items available. Add to cart (remove)
	4.	Understanding MEMS : principles and applications / Luis Casta�ner. by Casta�ner, Luis [author.] Material type: Text; Literary form: Not fiction Publisher: West Sussex, England : Wiley, 2016Copyright date: �2016 Online resources: Click to View Availability: No items available. Add to cart (remove)

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